@inproceedings{e65fe89695084c52b20386187eefc2c3,
title = "Electrothermally Tunable Accelerometer with Small Tuning Voltage and Very Large Sensitivity Tuning Range",
abstract = "This paper reports an electrothermally tunable accelerometer with very large tuning range. The device was fabricated in a SOI substrate. The proof mass in the proposed accelerometer was excited by electrostatic force at a carrier frequency. The applied vibration modulated the oscillating amplitude of the proof mass which was detected by piezoresistive signals. Differential bias voltages ±VB were applied to the sensing piezoresistors and, at the same time, heated the resonant beam for electrothermal tuning. With an applied bias/tuning voltage in the range of ±1.3 V to ±1.6 V, the measured sensitivity was tuned from 4.0 nV/g to 24.6 nV/g, corresponding to a tunability of 1000 %/V.",
keywords = "Accelerometer, Differential, Electrothermal, Feedthrough, Piezoresistive, Stress Softening, Tunable",
author = "Chuang, {Yu Chi} and Lee, {Yuan Chieh} and Yi Chiu",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "English",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "72--75",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "美國",
}