@inproceedings{e351c55808974534ae895a85a315b013,
title = "Electrothermally-driven long stretch micro drive with monolithic cascaded actuation units in compact arrangement",
abstract = "An electrothermally-driven long stretch micro drive (LSMD) is presented for in-plane rectilinear motions in hundreds of micrometers with very compact arrangement. High output performance (output displacements over device area excluding electrical contact pads) of 200 μm/mm2 has successfully achieved for devices made of 10∼12 μm thick electroplated nickel. The proposed device (N=5) features large output displacements with low operation temperatures (<350°C) and driving voltages (<4 volts). It can be operated up to 100 Hz at 3 volts without displacement degradations. Experiments and simulations are conducted to verify two design issues, bent beam angle and constraint bar width, with good agreements. The output displacements can be effectively magnify by cascading more actuation units in cascaded structures of the micro drive.",
keywords = "Drives, Electrothermal effects, Fabrication, Force sensors, Intelligent actuators, Intelligent sensors, Microactuators, Micromechanical devices, Optical sensors, Voltage",
author = "Hsu, {Chen Peng} and Tingsin Liao and Wen-Syang Hsu",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/SENSOR.2003.1215324",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "348--351",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "美國",
note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
}