Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Manu Garg, Dhairya Singh Arya, Sushil Kumar, Khanjan Joshi, Mujeeb Yousuf, Yi Chiu*, Pushpapraj Singh*

*此作品的通信作者

研究成果: Article › 同行評審

1 引文 斯高帕斯（Scopus）

指紋

深入研究「Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range」主題。共同形成了獨特的指紋。

Keyphrases

Engineering

Material Science