TY - GEN
T1 - Electroplating process of Ni-CNTS nanocomposite for MEMS resonator fabrication
AU - Lee, Yi Chia
AU - Cheng, Yu-Ting
AU - Hsu, Wen-Syang
PY - 2011/4/13
Y1 - 2011/4/13
N2 - The paper presents an electroplating process for Ni-Carbon Nanotubes (CNTs) nanocomposite micro-resonator (or μ-resonator) fabrication. Two kinds of chemical treatments, H2SO4/H2O2 and Sodium dodecyl sulfate (SDS) have been utilized for the surface modification of CNTs, respectively. The resonant frequency and Q factor of the SDS treated Ni-CNTs nanocomposite resonators are 30.65 kHz and 221, respectively. The values are higher than that of the one made of pure Ni and the H2SO 4/H2O2 mixture treated Ni-CNTs nanocomposite. They are 29.35 kHz, 190, and 30.35 kHz, 198, respectively. The experimental results indicate a better dispersion treatment on the CNTs in an electroplating bath could result in more incorporated CNTs in the Ni matrix and exhibit better improvement of device performance.
AB - The paper presents an electroplating process for Ni-Carbon Nanotubes (CNTs) nanocomposite micro-resonator (or μ-resonator) fabrication. Two kinds of chemical treatments, H2SO4/H2O2 and Sodium dodecyl sulfate (SDS) have been utilized for the surface modification of CNTs, respectively. The resonant frequency and Q factor of the SDS treated Ni-CNTs nanocomposite resonators are 30.65 kHz and 221, respectively. The values are higher than that of the one made of pure Ni and the H2SO 4/H2O2 mixture treated Ni-CNTs nanocomposite. They are 29.35 kHz, 190, and 30.35 kHz, 198, respectively. The experimental results indicate a better dispersion treatment on the CNTs in an electroplating bath could result in more incorporated CNTs in the Ni matrix and exhibit better improvement of device performance.
UR - http://www.scopus.com/inward/record.url?scp=79953802531&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2011.5734450
DO - 10.1109/MEMSYS.2011.5734450
M3 - Conference contribution
AN - SCOPUS:79953802531
SN - 9781424496327
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 416
EP - 419
BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Y2 - 23 January 2011 through 27 January 2011
ER -