Electrical properties of metal-silicon nitride-hydrogenated amorphous silicon capacitor elucidated using admittance spectroscopy

Ming Ta Hsieh*, Jenn-Fang Chen, Kuo Hsi Yen, Hsiao-Wen Zan, Chan Ching Chang, Chih Hsien Chen, Ching Chieh Shih, Yeong Shyang Lee

*此作品的通信作者

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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Physics & Astronomy

Engineering & Materials Science