@inproceedings{aa475185d030435daea53811194d2e7e,
title = "Electrical performance enhancement of a-AZTO by a low temperature Treatment",
abstract = " In this study, a supercritical fluid (SCF) technology is proposed to enhance the electrical performance and reliability of a-AZTO TFTs. The SCF provides liquid-like solvency and gas-like diffusivity, giving it transport capacity to take the H 2 O molecules into films and terminate the traps in films by the oxidization. ",
keywords = "AZTO, Low temperature treatment, SCF",
author = "Po-Tsun Liu and Fuh, {Chur Shyang} and Teng, {Li Feng} and Fan, {Yang Shun} and Chang, {Chih Hsiang}",
year = "2013",
month = jan,
day = "1",
language = "English",
series = "Proceedings of the International Display Workshops",
publisher = "International Display Workshops",
pages = "358--360",
booktitle = "20th International Display Workshops 2013, IDW 2013",
note = "null ; Conference date: 03-12-2013 Through 06-12-2013",
}
