Electrical Characteristics of Si0.8Ge0.2p-MOSFET With TMA Pre-Doping and NH3Plasma IL Treatment

Meng Chien Lee, Nien Ju Chung, Hung Ru Lin, Wei Li Lee, Yun Yan Chung, Shin Yuan Wang, Guang Li Luo, Chao Hsin Chien*

*此作品的通信作者

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds