Keyphrases
Electrical Characteristics
100%
Amorphous InGaZnO (a-IGZO)
100%
Thin-film Transistors
100%
Radio Frequency Magnetron Sputtering
100%
Oxygen Flow
100%
Field-effect Mobility
40%
Channel Resistance
40%
High-flow Oxygen
40%
Radio Frequency
20%
Zinc Oxide Thin Films
20%
Channel Length
20%
Magnetron Sputtering
20%
Effective Mobility
20%
Drain Resistance
20%
High Resistivity
20%
Total Resistance
20%
Channel Layer
20%
Transfer Curves
20%
Low Carrier Concentration
20%
Resistance Method
20%
Oxygen Flow Rate
20%
Engineering
Radio Frequency
100%
Magnetron
100%
Thin-Film Transistor
100%
Channel Resistance
100%
Flow Rate
50%
Channel Length
50%
Oxide Film
50%
Length Unit
50%
Channel Layer
50%
Flow Velocity
50%
Carrier Concentration
50%
Material Science
Electrical Property
100%
Thin-Film Transistor
100%
Gallium
100%
Zinc Oxide
100%
Indium
100%
Magnetron Sputtering
100%
Electrical Resistivity
33%
Film
33%
Oxide Film
33%
Carrier Concentration
33%