Electrical Characteristics Comparison of Ni/Al Source/Drain Electrodes for P-type Channel SnOxThin Film Transistors

Li Wei Yeh*, Chien Hung Wu, Po Tsun Liu, Wen Chun Chung, Kow-Ming Chang, Zhuang Ru Lin

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

Compared with the conventional a-Si one, thinfilm transistors (TFTs) with oxide semiconductor materials drew much attention in the recent decades. Current oxide based TFTs, however, are most designed for n-channel, only a few pchannel oxide has been used for TFTs. In order to make display circuits more energy efficient, design simplicity, complementary logic circuits with both n-channel and p-channel transistors can realize the goals. In this investigation, electron beam (E-beam) evaporator plays a role in depositing tin oxide (SnO) material as device active layer, and Ni/Al as TFT devices source/drain contact. The SnO thin film is then annealed with furnace, using different temperature to treat the channel layer. With proper annealing temperature, SnO thin film is going to show p-type electrical characteristics. The result shows that below 300\circ C furnace annealing, both Ni/Al electrodes TFT devices gets better electrical characteristics as temperature gets higher. And as expected, Ni electrode based SnO TFT is actually better than that of Al electrode based one. For such low process temperature \left(300\circ C\right), the devices have prominent potential on plastic substrates applications.

原文English
主出版物標題Proceedings of the 4th IEEE Eurasia Conference on IoT, Communication and Engineering 2022, ECICE 2022
編輯Teen-Hang Meen
發行者Institute of Electrical and Electronics Engineers Inc.
頁面148-150
頁數3
ISBN(電子)9781665482080
DOIs
出版狀態Published - 2022
事件4th IEEE Eurasia Conference on IoT, Communication and Engineering, ECICE 2022 - Yunlin, Taiwan
持續時間: 28 10月 202230 10月 2022

出版系列

名字Proceedings of the 4th IEEE Eurasia Conference on IoT, Communication and Engineering 2022, ECICE 2022

Conference

Conference4th IEEE Eurasia Conference on IoT, Communication and Engineering, ECICE 2022
國家/地區Taiwan
城市Yunlin
期間28/10/2230/10/22

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