Electrical and material characterization of atomic-layer-deposited Al2O3 gate dielectric on ammonium sulfide treated GaAs substrates

  • Chao Ching Cheng
  • , Chao-Hsin Chien*
  • , G. L. Luo
  • , Ching Chih Chang
  • , Chi Chung Kei
  • , Chun Hui Yang
  • , C. N. Hsiao
  • , Tsong Pyng Perng
  • , Chun-Yen Chang
    • *此作品的通信作者

研究成果: Conference article › 同行評審

3 引文 斯高帕斯（Scopus）

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Keyphrases

Engineering

Material Science

Chemical Engineering