Electrical and material characterization of atomic-layer-deposited Al2O3 gate dielectric on ammonium sulfide treated GaAs substrates
Chao Ching Cheng, Chao-Hsin Chien*, G. L. Luo, Ching Chih Chang, Chi Chung Kei, Chun Hui Yang, C. N. Hsiao, Tsong Pyng Perng, Chun-Yen Chang
*此作品的通信作者
研究成果: Conference article › 同行評審
3
引文
斯高帕斯（Scopus）