The elastic, mechanical, and thermal properties of nanocrystalline diamond films were investigated by using chemical vapor deposition (CVD) technique. The grain size and optical quality of the films were characterized by scanning electron microscopy and Raman measurements. The results showed that the thermal diffusivity value for the nanocrystalline film grown under high nucleation densities were 25% higher with respect to the films grown under low nucleation densities.
|頁（從 - 到）||2164-2171|
|期刊||Journal of Applied Physics|
|出版狀態||Published - 15 2月 2003|