Effects of sputtering process on the thermochromic function of vanadium dioxide thin films

Engineering & Materials Science

• Vanadium dioxide 100%
• Sputtering 81%
• Thin films 60%
• Vanadium 58%
• Oxygen 51%
• Oxides 41%
• Crystal structure 41%
• Spectrometers 37%
• Rapid thermal annealing 24%
• Oxygen supply 23%
• Opacity 20%
• Optical properties 19%
• Oxide films 19%
• Electric Conductivity 17%
• Diffraction 17%
• Crystalline materials 16%
• Crystals 15%
• Hysteresis 15%
• X rays 14%
• Flow rate 12%
• Hot Temperature 7%
• Temperature 6%

Physics & Astronomy

• dioxides 69%
• vanadium 65%
• vanadium oxides 50%
• sputtering 49%
• oxygen 38%
• thin films 32%
• thermochromic coatings 21%
• crystal structure 20%
• spectrometers 19%
• electrical resistivity 16%
• vibration mode 11%
• x ray diffraction 11%
• transmittance 10%
• flow velocity 10%
• hysteresis 9%
• cycles 8%
• optical properties 8%
• oxides 7%
• probes 7%
• annealing 7%
• room temperature 7%
• characterization 7%
• crystals 6%

Chemical Compounds

• Vanadium Dioxide 99%
• Thermochromism 79%
• Sputtering 69%
• Vanadium Oxide 45%
• Dioxygen 31%
• Rapid Thermal Annealing 19%
• Crystal Structure 12%
• Transmittance 12%
• Hysteresis 12%
• Liquid Film 12%
• Tetragonal Space Group 11%
• Amount 10%
• Electrical Conductivity 9%
• Flow Kinetics 9%
• Monoclinic Space Group 9%
• Optical Property 9%
• Probe 7%
• Ambient Reaction Temperature 7%
• Oxide 6%