Effects of polysilicon gate doping concentration on plasma charging damage in ultrathin gate oxides

Chi Chun Chen, Horng-Chih Lin, Chun Yen Chang, Tiao Yuan Huang, Chao-Hsin Chien, Mong Song Liang

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

指紋

深入研究「Effects of polysilicon gate doping concentration on plasma charging damage in ultrathin gate oxides」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds