摘要
Effects of poly-gate doping concentration on plasma charging damage in ultrathin gate oxides were investigated. While the charge-to-breakdown (Qbd) value under gate injection stress polarity (-Vg) is independent of the doping concentration, Qbd under substrate injection stress polarity (+Vg) shows a noticeable improvement with increasing doping concentration. However, our results show that plasma-induced oxide degradation is actually aggravated with increasing poly-gate doping concentration. These seemingly inconsistent observations can be explained by the lowering of plasma charging potential in the case of insufficient poly-gate doping.
原文 | English |
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頁(從 - 到) | 103-105 |
頁數 | 3 |
期刊 | Electrochemical and Solid-State Letters |
卷 | 3 |
發行號 | 2 |
DOIs | |
出版狀態 | Published - 2月 2000 |