Effects of N₂ and O₂ annealing on the multianalyte biosensing characteristics of CeO₂-based electrolyte-insulator- semiconductor structures

Keyphrases

• Annealing 100%
• Semiconductor Structures 100%
• Electrolyte-insulator-semiconductor 100%
• Ambience 100%
• Multi-analyte Biosensing 100%
• Sensing Performance 66%
• Material Sensing 66%
• Multi-analyte 66%
• Treatment Conditions 33%
• X Ray Diffraction 33%
• Atomic Force Microscopy 33%
• Urea 33%
• X-ray Photoelectron Spectroscopy 33%
• Silicon Substrate 33%
• Oxygen Vacancy 33%
• Annealing Treatment 33%
• Quality Performance 33%
• Material Properties 33%
• Reflow 33%
• Sensing Capability 33%
• Annealing Effect 33%
• Material Analysis 33%
• Material Quality 33%
• Na + 33%
• Drift Rate 33%
• Low Drift 33%
• Annealing Ambience 33%
• Optimal Treatment 33%

Engineering

• Biosensing 100%
• Sensing Performance 100%
• Semiconductor Structure 100%
• Ray Diffraction 50%
• Ray Photoelectron Spectroscopy 50%
• Atomic Force Microscopy 50%
• Biosensor 50%
• Silicon Substrate 50%
• Oxygen Vacancy 50%
• Annealing Effect 50%
• Material Quality 50%
• Sensing Capability 50%

Material Science

• Cerium Oxide 100%
• Semiconductor Structure 100%
• X-Ray Diffraction 50%
• X-Ray Photoelectron Spectroscopy 50%
• Silicon 50%
• Oxygen Vacancy 50%
• Materials Property 50%