Effects of metallic contaminants on the electrical characteristics of ultrathin gate oxides

Tung Ming Pan*, Fu-Hsiang Ko, Tien-Sheng Chao, Chieh Chuang Chen, Kuei Shu Chang-Liao

*此作品的通信作者

    研究成果: Article同行評審

    16 引文 斯高帕斯(Scopus)

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    Engineering & Materials Science

    Chemical Compounds

    Physics & Astronomy