Effects of laser sources on the structural damage mechanisms and reverse-bias leakages of laser lift-off GaN-based LEDs

Ji Hao Cheng*, Cheng Liao, Ping Wei Huang, Yew-Chuhg Wu

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

The frequency-tripled Nd YAG laser (355nm) and the KrF pulsed excimer laser (248 nm) were used to separate GaN from sapphire substrates. The laser damage mechanism of these two laser sources and effects on the reverse-bias leakages of GaN-based light-emitting diodes (LEDs) were studied.

原文English
主出版物標題ECS Transactions - State-of-the-Art Program on Compound Semiconductors 49 (SOTAPOCS 49) -and- Nitrides and Wide-Bandgap Semiconductors for Sensors, Photonics, and Electronics 9
頁面123-125
頁數3
版本7
DOIs
出版狀態Published - 1 12月 2008
事件State-of-the-Art Program on Compound Semiconductors 49 (SOTAPOCS 49) -and- Nitrides and Wide-Bandgap Semiconductors for Sensors, Photonics, and Electronics 9 - 214th ECS Meeting - Honolulu, HI, United States
持續時間: 12 10月 200817 10月 2008

出版系列

名字ECS Transactions
號碼7
16
ISSN(列印)1938-5862
ISSN(電子)1938-6737

Conference

ConferenceState-of-the-Art Program on Compound Semiconductors 49 (SOTAPOCS 49) -and- Nitrides and Wide-Bandgap Semiconductors for Sensors, Photonics, and Electronics 9 - 214th ECS Meeting
國家/地區United States
城市Honolulu, HI
期間12/10/0817/10/08

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