Effects of laser sources on the reverse-bias leakages of laser lift-off GaN-based leds

Ji Hao Cheng*, Wei Chih Peng, Yew-Chuhg Wu, Hao Ouyang

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

The KrF pulsed excimer laser (248 nm) and the frequency-tripled Nd YAG laser (355nm) were used to separate GaN thin films from sapphire substrates. The effect of these two laser sources on the reverse-bias leakages of InGaN-GaN light-emitting diodes (LEDs) were studied.

原文English
主出版物標題ECS Transactions - 46th State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLVI) and the 2nd International Symposium on Processes at the Semiconductor-Solution Interface
頁面285-287
頁數3
版本2
DOIs
出版狀態Published - 1 12月 2007
事件46th State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLVI) and the 2nd International Symposium on Processes at the Semiconductor-Solution Interface - 211th ECS Meeting - Chicago, IL, 美國
持續時間: 6 5月 200710 5月 2007

出版系列

名字ECS Transactions
號碼2
6
ISSN(列印)1938-5862
ISSN(電子)1938-6737

Conference

Conference46th State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLVI) and the 2nd International Symposium on Processes at the Semiconductor-Solution Interface - 211th ECS Meeting
國家/地區美國
城市Chicago, IL
期間6/05/0710/05/07

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