Effects of fluorine-implanted treatment on Ba_0.7Sr_0.3TiO₃ films

Keyphrases

• Ba0.7Sr0.3TiO3 100%
• Dielectric Properties 66%
• F Ions 66%
• Leakage Property 66%
• Crystallinity 33%
• Order of Magnitude 33%
• Applied Voltage 33%
• Leakage Current Density 33%
• Ion Implantation 33%
• Dielectric Constant 33%
• Leakage Performance 33%
• Ion Dose 33%

Material Science

• Film 100%
• Density 33%
• Permittivity 33%
• Dielectric Property 33%
• Ion Implantation 33%
• Dielectric Material 33%