Residual stress, microstrain and grain size of ion plated Cr films deposited on molybdenum substrates were analyzed and studied. A model based on the effects of incident particle energy and/or momentum on the properties of these films is proposed and discussed. It was concluded that the film properties may be affected by both the momentum and energy transfer of the incident particles, or by either one.
|頁（從 - 到）||103-106|
|期刊||Thin Solid Films|
|出版狀態||Published - 22 1月 2003|
|事件||proceedings of the 1st Ineternational Conference on Materials - Singapore, Singapore|
持續時間: 1 7月 2001 → 6 7月 2001