Effectiveness of NH3 plasma treatment in preventing wet stripper damage to low-k hydrogen silsesquioxane (HSQ)

Ting Chang, Yi Shien Mor, Po-Tsun Liu, Tsung Ming Tsai, Chi Wen Chen, Yu Jen Mei, Simon M. Sze

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3 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy