Effectiveness of NH3 plasma treatment in preventing wet stripper damage to low-k hydrogen silsesquioxane (HSQ)
Ting Chang, Yi Shien Mor, Po-Tsun Liu, Tsung Ming Tsai, Chi Wen Chen, Yu Jen Mei, Simon M. Sze
研究成果: Article › 同行評審
3
引文
斯高帕斯（Scopus）