Effect of the forming gas annealing on the Zinc Gallium Oxide based Deep UV photodetector characteristics grown by metalorganic chemical vapor deposition

Siddharth Rana, Fu Gow Tarntair, Jitendra Pratap Singh, Ray Hua Horng*

*此作品的通信作者

研究成果: Conference contribution同行評審

3 引文 斯高帕斯(Scopus)

摘要

Zinc Gallium oxide epilayer was grown on sapphire c-plane substrate by Metal organic chemical vapor deposition (MOCVD). Metal-semiconductor-metal (MSM) photodetectors were fabricated with Ni/Au Contacts. The effect of the Forming gas annealing (FGA) treatment on the Photodetector (PD) Characteristics was studied.

原文English
主出版物標題2023 IEEE Photonics Conference, IPC 2023 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9798350347227
DOIs
出版狀態Published - 2023
事件2023 IEEE Photonics Conference, IPC 2023 - Orlando, United States
持續時間: 12 11月 202316 11月 2023

出版系列

名字2023 IEEE Photonics Conference, IPC 2023 - Proceedings

Conference

Conference2023 IEEE Photonics Conference, IPC 2023
國家/地區United States
城市Orlando
期間12/11/2316/11/23

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