Effect of SiO2 additive as inhibitor on crystalline structure and H2S sensing performance of CuO-Au-SnO2 thin film prepared by liquid phase deposition

Jin-Chern Chiou*, Shang Wei Tsai, Cheng Tang Huang

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

In situ SiO2-doped SnO2 thin films have been prepared by liquid phase deposition method. The effect of SiO2 additive on the surface morphology and crystalline structural of the thin films were investigated by grazing incident angle X-ray diffraction (GIAXRD) and scanning electron microscopy (SEM). In the characteristics of sensing response, the SiO2-doped CuOAu-SnO2 gas sensors (Si/Sn = 0.25 and 0.33) have greater sensitivity and shorter response time than CuO-Au-SnO2 gas sensor. However, the doped CuO-Au-SnO2 gas sensors (Si/Sn = 0.33) can obtained better sensitivity (S = 67 for 2ppm) and response time (t90% < 3 s).

原文English
主出版物標題IEEE Sensors 2010 Conference, SENSORS 2010
頁面333-336
頁數4
DOIs
出版狀態Published - 1 十二月 2010
事件9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
持續時間: 1 十一月 20104 十一月 2010

出版系列

名字Proceedings of IEEE Sensors

Conference

Conference9th IEEE Sensors Conference 2010, SENSORS 2010
國家/地區United States
城市Waikoloa, HI
期間1/11/104/11/10

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