Effect of porogen incorporation on pore morphology of low-k SiCxNy films prepared using PECVD

Hung En Tu, Chun Jen Su, U. Ser Jeng, Jih-Perng Leu

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    2 引文 斯高帕斯(Scopus)

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    深入研究「Effect of porogen incorporation on pore morphology of low-k SiC<sub>x</sub>N<sub>y</sub> films prepared using PECVD」主題。共同形成了獨特的指紋。

    Chemical Compounds

    Engineering & Materials Science