Effect of polymer modification on microwave digestion efficiency, thermal stability and plasma etching resistance for the photoresist

Fu-Hsiang Ko, June Kuen Lu, Tieh Chi Chu, Cheng Tung Chou, Li Tung Hsiao, Horng-Chih Lin

研究成果: Article › 同行評審

9 引文 斯高帕斯（Scopus）

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Keyphrases

Chemistry

Material Science

Chemical Engineering