Effect of oxygen absorption on contact resistance between metal and carbon nano tubes (CNTs)

Bing-Yue Tsui*, Chien Li Weng, Chih Lien Chang, Jeng Hua Wei, Ming Jinn Tsai

*此作品的通信作者

    研究成果: Conference contribution同行評審

    3 引文 斯高帕斯(Scopus)

    摘要

    Contact resistance (Ro) between metal and carbon nanotubes (CNTs) is studied extensively. Metal oxide formation at interface due to oxygen absorption plays very important role. Chemically inert metals such as Pt and Au results in the lowest Rc. Adding Ta into Pt can solve the adhesion issue while keeps low Rc. Those metals can break metal oxide and form metal carbide are also preferred.

    原文English
    主出版物標題2006 International Symposium on VLSI Technology, Systems, and Applications, VLSI-TSA - Proceedings of Technical Papers
    頁面86-87
    頁數2
    DOIs
    出版狀態Published - 1 12月 2006
    事件2006 International Symposium on VLSI Technology, Systems, and Applications, VLSI-TSA - Hsinchu, Taiwan
    持續時間: 24 4月 200626 4月 2006

    出版系列

    名字International Symposium on VLSI Technology, Systems, and Applications, Proceedings

    Conference

    Conference2006 International Symposium on VLSI Technology, Systems, and Applications, VLSI-TSA
    國家/地區Taiwan
    城市Hsinchu
    期間24/04/0626/04/06

    指紋

    深入研究「Effect of oxygen absorption on contact resistance between metal and carbon nano tubes (CNTs)」主題。共同形成了獨特的指紋。

    引用此