Effect of dose loss of phosphorus on capacitancevoltage characteristics of n-type poly-Si junctionless thin-film transistors

Engineering & Materials Science

• Thin film transistors 100%
• Phosphorus 94%
• Polysilicon 90%
• Electric potential 40%
• Capacitance 40%
• Doping (additives) 34%
• Transistors 26%

Physics & Astronomy

• phosphorus 76%
• transistors 62%
• dosage 51%
• thin films 40%
• electric potential 33%
• capacitance 25%
• silicon transistors 21%
• capacitance-voltage characteristics 19%
• depletion 13%
• curves 8%

Chemical Compounds

• Phosphorus(.) 65%
• Dose 60%
• Voltage 56%
• Point Group C∞V 31%
• Polycrystalline Solid 17%
• Surface 6%