TY - JOUR
T1 - Dynamic characteristics measurement system for optical scanning micromirror
AU - Chiou, Jin-Chern
AU - Lin, Y. C.
AU - Chang, Y. C.
PY - 2000/11/27
Y1 - 2000/11/27
N2 - This paper describes the development of a novel, flexible, with appropriate accuracy dynamic characteristics measurement system for optical scanning micromirror. With the system, we can measure dynamic behaviors such as transient response, scan speed, scan angle, scan repeatability, and scan non-linearity of the scanning micromirror devices. Moreover, the optical system performances such as scan spot size and even scan spot intensity can also be obtained.
AB - This paper describes the development of a novel, flexible, with appropriate accuracy dynamic characteristics measurement system for optical scanning micromirror. With the system, we can measure dynamic behaviors such as transient response, scan speed, scan angle, scan repeatability, and scan non-linearity of the scanning micromirror devices. Moreover, the optical system performances such as scan spot size and even scan spot intensity can also be obtained.
KW - Optical performance of micromirror
KW - Scan angle
KW - Scan non-linearity
KW - Scan speed
KW - Scanning micromirror
UR - http://www.scopus.com/inward/record.url?scp=0034453492&partnerID=8YFLogxK
U2 - 10.1117/12.404902
DO - 10.1117/12.404902
M3 - Conference article
AN - SCOPUS:0034453492
SN - 0277-786X
VL - 4230
SP - 180
EP - 186
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Micromachining and Microfabrication
Y2 - 28 November 2000 through 30 November 2000
ER -