Differential-phase optical coherence reflectometer for surface profile measurement

Huan Jang Huang, Wen-Chuan Kuo, Sheng Yi Chang, Chien Wa Ho, Chien Chou*

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

We developed a novel differential-phase optical coherence reflectometer (DP-OCR) by using a low-coherence light source and integrated with differential phase detection technique on surface profile measurement. In this setup, 2Å on detection of axial displacement was demonstrated. Thus, a localized surface profile was measured precisely by scanning an optical grating surface in this measurement. Moreover, the requirement on equal amplitude of the reference and signal beams of this novel refiectometer is discussed.

原文English
主出版物標題Optical Coherence Tomography and Coherence Techniques III
頁面66271K1-66271K8
頁數8
DOIs
出版狀態Published - 11 7月 2007
事件Optical Coherence Tomography and Coherence Techniques III - Munich, Germany
持續時間: 17 6月 200719 6月 2007

出版系列

名字Progress in Biomedical Optics and Imaging - Proceedings of SPIE
6627
ISSN(列印)1605-7422

Conference

ConferenceOptical Coherence Tomography and Coherence Techniques III
國家/地區Germany
城市Munich
期間17/06/0719/06/07

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