Development of stable micro-crystalline silicon AMLCD

Chan Ching Chang*, Chih Hsien Chen, Ya Hui Peng, Yeong Shyang Lee, Chih Yuan Hou, Kun Fu Huang, Houg Tao Shih, Fan Shin Tseng, Ming Ta Hsieh, Jenn-Fang Chen

*此作品的通信作者

研究成果: Paper同行評審

摘要

Bottom-gate microcrystalline silicon thin film transistors (μc-Si TFTs) have been produced by the radio frequency glow discharge technique using three different plasma treatment on the interface between microcrystalline and SiN layers. Our first microcrystalline silicon TFTs have better stability at high temperature stress.

原文English
頁面1921-1923
頁數3
出版狀態Published - 1 十二月 2007
事件14th International Display Workshops, IDW '07 - Sapporo, Japan
持續時間: 5 十二月 20075 十二月 2007

Conference

Conference14th International Display Workshops, IDW '07
國家/地區Japan
城市Sapporo
期間5/12/075/12/07

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