Development of novel cascade structure for improving stroke of electrostatic comb-drive actuator

Jin-Chern Chiou, C. F. Kuo, Y. J. Lin, C. W. Chang, K. C. Hou

研究成果: Conference contribution同行評審

2 引文 斯高帕斯(Scopus)

摘要

In this study, a novel cascade structure for improving the stroke of electrostatic comb-drive actuator is proposed. With the cascade configuration, the stroke can be improving efficiency. The proposed actuators were fabricated through CMOS processes and post-CMOS micromachining steps. Experimental results indicated that the stroke of the lateral and vertical cascade electrostatic comb-drive actuators can be improved 180% and 188% respectively without adding extra driving voltage. These results demonstrated that the proposed cascade configurations have the capability to improve the actuation stroke of electrostatic actuators.

原文English
主出版物標題MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
頁面471-474
頁數4
DOIs
出版狀態Published - 29 8月 2008
事件21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
持續時間: 13 1月 200817 1月 2008

出版系列

名字Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(列印)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
國家/地區United States
城市Tucson, AZ
期間13/01/0817/01/08

指紋

深入研究「Development of novel cascade structure for improving stroke of electrostatic comb-drive actuator」主題。共同形成了獨特的指紋。

引用此