Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope

Kuang Yuh Huang*, En Tc Hwu, Hsin Yi Chow, Shao-Kang Hung

*此作品的通信作者

研究成果: Conference contribution同行評審

7 引文 斯高帕斯(Scopus)

摘要

This paper is to present the development and the verification of a compact optical sensor system for measuring the displacement of the micro cantilever In scanning probe microscope (SPM). An optical pickup head of commercial compact disc (CD)/disk versatile disc (DVD) read only memory (ROM) drive is applied in this displacement sensor system. For fulfilling our tight measuring requirements of sensibility and reliability, the build-in detection device h replaced with a four-quadrant photodiode. The developed system is well functionally verified by measuring calibration sample of 463 nm (pitch) × 30nm (height).

原文English
主出版物標題Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
頁面695-698
頁數4
DOIs
出版狀態Published - 1 十二月 2005
事件2005 IEEE International Conference on Mechatronics, ICM '05 - Taipei, Taiwan
持續時間: 10 七月 200512 七月 2005

出版系列

名字Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
2005

Conference

Conference2005 IEEE International Conference on Mechatronics, ICM '05
國家/地區Taiwan
城市Taipei
期間10/07/0512/07/05

指紋

深入研究「Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope」主題。共同形成了獨特的指紋。

引用此