Development of an automated optical inspection system for rapidly and precisely measuring dimensions of embedded microchannel structures in transparent bonded chips
- Pin Chuan Chen*
- , Ya Ting Lin
- , Chi Minh Truong
- , Pai Shan Chen
- , Huihua Kenny Chiang*
*此作品的通信作者
研究成果: Letter › 同行評審
5
引文
斯高帕斯(Scopus)