Design verifications of a linear laser encoder with high head-to-scale tolerance

C. C. Wu*, Y. C. Chen, C. K. Lee, C. T. Hsieh, W. J. Wu, S. S. Lu

*此作品的通信作者

研究成果: Conference article同行評審

10 引文 斯高帕斯(Scopus)

摘要

Laser encoders overcome the fundamental resolution limit of geometrical optical encoders by cleverly converting the diffraction limit to phase coded information so as to facilitate nanometer displacement measurement. As positioning information was coded within the optical wavefront of laser encoders, interferometry principle thus must be adopted within the design of the laser encoders. This effect has posed a very strong alignment tolerance among various components of the whole laser encoder, which in turn impose a serious user adaptation bottleneck. Out of all alignment tolerance, the head-to-scale alignment tolerance represents the most important hindrance for wider applications. Improving the IBM laser optical encoder design by taking into the consideration of manufacturing tolerance of various optical components, an innovative linear laser encoder with very high head-to-scale tolerance is presented in this article. Efficiency of the TE/TM incident light beams on the grating scale used are examined theoretically and verified experimentally so as to provide design optimizations of the grating scale. Effect of various grating scales, quartz master or polymer-based grating replicate, is also detailed. Signal processing used to decode the quadrature based positioning optical signal is also studied. Experimental results that verify the resolutions of the tabletop laser encoder prototype by comparing the decoded quadrature signal and a HP laser interferometer output signal is also presented.

原文English
頁(從 - 到)73-82
頁數10
期刊Proceedings of SPIE - The International Society for Optical Engineering
3779
DOIs
出版狀態Published - 1999
事件Proceedings of the 1999 Current Developments in Optical Design and Optical Engineering VIII - Denver, CO, USA
持續時間: 19 7月 199921 7月 1999

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