Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator

Shen Che Huang, Qiangsheng Huang, Keqi Ma, Jianhao Zhang, Yaocheng Shi, Daoxin Dai, Tien-chang Lu, Sailing He

研究成果: Conference contribution同行評審

摘要

The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.

原文English
主出版物標題4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781479942084
DOIs
出版狀態Published - 23 6月 2015
事件4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015 - Taipei, Taiwan
持續時間: 4 5月 20156 5月 2015

出版系列

名字4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015

Conference

Conference4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015
國家/地區Taiwan
城市Taipei
期間4/05/156/05/15

指紋

深入研究「Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator」主題。共同形成了獨特的指紋。

引用此