Design and fabrication of micromachined LPD-based SnO2 gas sensor integrated TaN with micro-hotplate

Jin-Chern Chiou*, Chia Yang Lin, Shang Wei Tsai, Wei Che Hong

*此作品的通信作者

研究成果: Conference contribution同行評審

2 引文 斯高帕斯(Scopus)

摘要

In this study, the design and fabrication of a micromachined LPD-based SnO2 gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO2 gas sensor with TaN micro-heater to H2S gas were measured in different operating temperatures. In sensing properties, the resistances of the gas sensor significantly change in the staircase concentration of H2S gas and which optimal operating temperature was 250 °C.

原文English
主出版物標題IEEE SENSORS 2012 - Proceedings
DOIs
出版狀態Published - 1 12月 2012
事件11th IEEE SENSORS 2012 Conference - Taipei, Taiwan
持續時間: 28 10月 201231 10月 2012

出版系列

名字Proceedings of IEEE Sensors

Conference

Conference11th IEEE SENSORS 2012 Conference
國家/地區Taiwan
城市Taipei
期間28/10/1231/10/12

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