Design and fabrication of MEMS-based thermally-actuated image stabilizer for cell phone camera

Chun Ying Lin, Jin-Chern Chiou*

*此作品的通信作者

研究成果: Article同行評審

10 引文 斯高帕斯(Scopus)

摘要

A micro-electro-mechanical system (MEMS)-based image stabilizer is proposed to counteracting shaking in cell phone cameras. The proposed stabilizer (dimensions, 8.8 × 8.8 × 0.2 mm3) includes a two-axis decoupling XY stage and has sufficient strength to suspend an image sensor (IS) used for anti-shaking function. The XY stage is designed to send electrical signals from the suspended IS by using eight signal springs and 24 signal outputs. The maximum actuating distance of the stage is larger than 25 μm, which is sufficient to resolve the shaking problem. Accordingly, the applied voltage for the 25 μm moving distance is lower than 20 V; the dynamic resonant frequency of the actuating device is 4485 Hz, and the rising time is 21 ms.

原文English
頁(從 - 到)64-71
頁數8
期刊Solid-State Electronics
77
DOIs
出版狀態Published - 1 11月 2012

指紋

深入研究「Design and fabrication of MEMS-based thermally-actuated image stabilizer for cell phone camera」主題。共同形成了獨特的指紋。

引用此