@article{790e838da23a4c7dae3b4da9d48091f6,
title = "Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication",
abstract = "Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.",
keywords = "CNC-machining, Deep reactive ion etching, Electroplating, Hot embossing, Liquid resin casting, Microfabrication, Photolithography, Thin wall injection molding",
author = "James Lee and Madou, {Marc J.} and Koelling, {Kurt W.} and Sylvia Daunert and Siyi Lai and Guan Koh and Juang, {Yi Je} and Yumin Lu and Liyong Yu",
note = "Funding Information: The authors wish to thank Lynn Kim and Yihfar Chen at Burstein Technologies Inc. for their assistance on making DRIE mold. This work is supported by NASA, NSF (DMI-0084919), and the NSF Centers for Advanced Polymer and Composite Engineering (CAPCE) and Industrial Sensors and Measurements (CISM) at The Ohio State University.",
year = "2001",
doi = "10.1023/A:1012469017354",
language = "English",
volume = "3",
pages = "339--351",
journal = "Biomedical Microdevices",
issn = "1387-2176",
publisher = "Kluwer Academic Publishers",
number = "4",
}