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Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
Jing Yang
, Fangfang Luo
,
Tsung-Sheng Kao
, Xiong Li
, Ghim Wei Ho
, Jinghua Teng
, Xiangang Luo
, Minghui Hong
*
*
此作品的通信作者
光電工程學系
研究成果
:
Article
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同行評審
307
引文 斯高帕斯(Scopus)
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Keyphrases
Si Surface
100%
Ultra-low Reflection
100%
Nanoprocessing
100%
Black Si
100%
Nanopatterning
33%
Silicon Nanowires (SiNWs)
33%
Microstructure
33%
Light Trapping
33%
Antireflection
33%
High Reflectivity
33%
Direct Laser Writing
33%
Surface Plasmon Resonance
33%
Metallic Nanoparticles
33%
Broadband Antireflection
33%
High Aspect Ratio
33%
Ambient Air
33%
Subwavelength Structures
33%
Antireflection Surfaces
33%
Nanoparticle Surface
33%
Metal-assisted Chemical Etching
33%
Broadband Reflection
33%
Light Reflection
33%
Si Nanowire Arrays
33%
Gradient Refractive Index
33%
Light Collection
33%
Light Collection Efficiency
33%
Reflection Performance
33%
Laser Interference Lithography
33%
Engineering
Si Surface
100%
Laser Micro
100%
Reflectance
100%
Si Nanowires
66%
Light Collection
66%
Refractive Index
33%
Multiphoton Lithography
33%
High Aspect Ratio
33%
Collection Efficiency
33%
Optoelectronic Device
33%
Ambient Air
33%
Nanopatterning
33%
Nanoparticle Surface
33%
Laser Interference Lithography
33%
Surface Plasmon
33%
Refractivity
33%
Metal Nanoparticle
33%
Material Science
Nanowire
100%
Reflectivity
100%
Surface (Surface Science)
100%
Lithography
50%
Refractive Index
50%
Metal Nanoparticle
50%
Surface Plasmon Resonance
50%