@inproceedings{2cf9b377a30b4fb7b918cfe2ace7ae4a,
title = "Design and Fabrication of a Passive Pressure Sensor Based on Biocompatible Ormocomp",
abstract = "This paper presents a passive LC resonant pressure sensor fabricated and packaged in biocompatible Ormocomp. The applied pressure changes the sensing cavity gap and thus the LC resonance frequency of the sensor. The fabrication and packaging processes based on casting and lamination were demonstrated. The measured resonance frequency and sensitivity were 477 MHz and 74 kHz/kPa, respectively. Cytocompatibility tests showed that the packaged device was water tight and not toxic to cells during a two-day cell culture.",
keywords = "A549 Cell Line, Biocompatible, Cytocompatibility, LC Resonance, Ormocomp, Pressure Sensor",
author = "Yi Chiu and Liao, {Chun Hsiang} and Gianmario Scotti and Parvaneh Sardarabadi and Liu, {Cheng Hsien}",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "English",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1531--1534",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "美國",
}