Design and Fabrication of a Passive Pressure Sensor Based on Biocompatible Ormocomp

Yi Chiu*, Chun Hsiang Liao, Gianmario Scotti, Parvaneh Sardarabadi, Cheng Hsien Liu

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

This paper presents a passive LC resonant pressure sensor fabricated and packaged in biocompatible Ormocomp. The applied pressure changes the sensing cavity gap and thus the LC resonance frequency of the sensor. The fabrication and packaging processes based on casting and lamination were demonstrated. The measured resonance frequency and sensitivity were 477 MHz and 74 kHz/kPa, respectively. Cytocompatibility tests showed that the packaged device was water tight and not toxic to cells during a two-day cell culture.

原文English
主出版物標題2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1531-1534
頁數4
ISBN(電子)9784886864352
出版狀態Published - 2023
事件22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, 日本
持續時間: 25 6月 202329 6月 2023

出版系列

名字2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
國家/地區日本
城市Kyoto
期間25/06/2329/06/23

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