Design and fabrication of a near-field scanning optical microscope probe by CMOS-MEMS

C. H. Liou*, Yi Chiu, H. P.D. Shieh, Jin-Chern Chiou

*此作品的通信作者

研究成果: Conference contribution同行評審

3 引文 斯高帕斯(Scopus)

摘要

A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.

原文English
主出版物標題2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
頁面168-169
頁數2
DOIs
出版狀態Published - 22 11月 2012
事件2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada
持續時間: 6 8月 20129 8月 2012

出版系列

名字International Conference on Optical MEMS and Nanophotonics
ISSN(列印)2160-5033
ISSN(電子)2160-5041

Conference

Conference2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
國家/地區Canada
城市Banff, AB
期間6/08/129/08/12

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