Design and fabrication of a cascaded electro-thermal bimorph actuator

Keyphrases

• Actuation Unit 100%
• Vertical Displacement 100%
• Bimorph Actuator 100%
• Bimorph Thermal Actuator 100%
• Maximum Temperature 100%
• Suspended Structure 66%
• Polysilicon 33%
• Residual Stress 33%
• Input Voltage 33%
• Proposed Design 33%
• Device Sizing 33%
• Actuator Design 33%
• ANSYS 33%
• Isotropic Etching 33%
• Surface Micromachining 33%
• Operating Temperature 33%
• Bimorph Beam 33%
• Micromachining Technique 33%
• XeF2 33%
• Large Vertical Displacement 33%
• Infrared Thermal 33%
• Thermal Microscope 33%

Engineering

• Actuator 100%
• Actuation 75%
• Maximum Temperature 75%
• Residual Stress 25%
• Input Voltage 25%
• Good Agreement 25%
• Simulated Result 25%
• Surface Micro-Machining 25%
• Operating Temperature 25%
• Polysilicon 25%