Design and characterization of an electrothermally driven monolithic long-stretch microdrive in compact arrangement

Keyphrases

• Microdrive 100%
• Compact Arrangement 100%
• Cascade Structure 50%
• Output Force 50%
• In Situ 25%
• Design Parameters 25%
• Compliant Structures 25%
• Actuation Unit 25%
• Design Concept 25%
• Design Features 25%
• Bending Angle 25%
• Operating Voltage 25%
• Am(III) 25%
• Good Linearity 25%
• Test Beam 25%
• Relative Displacement 25%
• Geometrical Design 25%
• Bar Diameter 25%
• Rectilinear Motion 25%
• Area Saving 25%
• Double Output 25%
• Long Stroke 25%
• Maximum Operation Temperature 25%
• Micromechanical Testing 25%

Engineering

• Output Force 100%
• Design Parameter 50%
• Actuation 50%
• Design Concept 50%
• Design Feature 50%
• Operation Temperature 50%
• Operating Voltage 50%
• Test Beam 50%
• Relative Displacement 50%
• Displacement Relation 50%