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Derivation of Variable Soft Sphere Model Parameters in Direct-Simulation Monte Carlo Method Using Quantum Chemistry Computation
Jong-Shinn Wu
*
, Yu Lin Hsu
*
此作品的通信作者
機械工程學系
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引文 斯高帕斯(Scopus)
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Keyphrases
Direct Simulation Monte Carlo
100%
Quantum Chemical Computation
100%
Soft Sphere
100%
Lennard-Jones Potential
100%
Soft-sphere Model
100%
Molecular Model
66%
Gas Species
66%
Practical Procedures
33%
Silicon-based
33%
Chemical Vapor Deposition Processes
33%
Existing Data
33%
Gas-kinetic Scheme
33%
Diffusivity Coefficient
33%
Monte Carlo Computation
33%
Viscosity Coefficient
33%
Intermolecular Potential Energy
33%
Sphere Parameter
33%
Engineering
Direct Simulation
100%
Model Parameter
100%
Sphere Model
100%
Gas Specie
66%
Test Result
33%
Chemical Vapor Deposition
33%
Vapor Deposition
33%
Good Agreement
33%
Potential Energy
33%
Illustrates
33%
Applicability
33%
Deposition Process
33%
Fluid Viscosity
33%
Diffusivity Coefficient
33%
Chemistry
Monte Carlo Method
100%
Quantum Chemistry
100%
Lennard-Jones Potential
100%
Molecular Model
66%
Chemical Vapor Deposition
33%
Potential Energy
33%
Silicon
33%
Vapor Deposition Process
33%
Diffusivity
33%
Kinetic Theory
33%
Intermolecular Potential
33%
Chemical Engineering
Diffusion
100%
Vapor Deposition
100%
Chemical Vapor Deposition
100%