Deposition and characterization of Ti(C,N,O) coatings by unbalanced megnetron sputtering

Engineering & Materials Science

• Sputtering 100%
• Characterization (materials science) 68%
• Coatings 58%
• Oxygen 45%
• Flow rate 33%
• Glow discharges 16%
• Magnetron sputtering 14%
• Nanoindentation 13%
• Spectrometers 13%
• Alumina 11%
• X ray diffraction 10%
• Thin films 10%
• Wear resistance 10%
• Nitrogen 10%
• Adhesion 10%
• Hardness 8%
• Wear of materials 8%
• Color 8%
• Friction 7%
• Testing 5%

Physics & Astronomy

• sputtering 61%
• coatings 52%
• characterization 43%
• flow velocity 35%
• oxygen 33%
• balls 20%
• wear resistance 12%
• nanoindentation 11%
• glow discharges 11%
• coefficient of friction 11%
• adhesion 9%
• magnetron sputtering 9%
• aluminum oxides 9%
• hardness 8%
• spectrometers 8%
• nitrogen 8%
• color 7%
• diffraction 5%
• thin films 5%
• x rays 5%
• performance 4%

Chemical Compounds

• Sputtering 84%
• Coating Agent 46%
• Flow Kinetics 34%
• Dioxygen 27%
• Wear Rate 14%
• Glow Discharge 13%
• Magnetron Sputtering 12%
• Friction Coefficient 12%
• Wear 10%
• Flow 7%
• Resistance 7%
• Nitrogen 6%
• X-Ray Diffraction 5%