TY - GEN
T1 - Dependence of layout parameters on CDE (Cable Discharge Event) robustness of CMOS devices in A 0.25-μM salicided CMOS process
AU - Ker, Ming-Dou
AU - Lai, Tai Xiang
PY - 2006/12/1
Y1 - 2006/12/1
N2 - In this paper, the long-pulse transmission line pulsing (LP-TLP) system is proposed to simulate the influence of Cable Discharge Event (CDE) on integrated circuits. The layout dependence on CDE robustness of gate-grounded NMOS (GGNMOS) and gate-VDD PMOS (GDPMOS) devices has been experimentally investigated in detail. All CMOS devices with different device dimensions, layout spacings, and clearances have been drawn and fabricated in a 0.25-μm salicided CMOS process to find optimum layout rules for CDE protection. From the measured results, the CDE robustness of CMOS devices is much worse than their HBM ESD robustness.
AB - In this paper, the long-pulse transmission line pulsing (LP-TLP) system is proposed to simulate the influence of Cable Discharge Event (CDE) on integrated circuits. The layout dependence on CDE robustness of gate-grounded NMOS (GGNMOS) and gate-VDD PMOS (GDPMOS) devices has been experimentally investigated in detail. All CMOS devices with different device dimensions, layout spacings, and clearances have been drawn and fabricated in a 0.25-μm salicided CMOS process to find optimum layout rules for CDE protection. From the measured results, the CDE robustness of CMOS devices is much worse than their HBM ESD robustness.
UR - http://www.scopus.com/inward/record.url?scp=34250745199&partnerID=8YFLogxK
U2 - 10.1109/RELPHY.2006.251298
DO - 10.1109/RELPHY.2006.251298
M3 - Conference contribution
AN - SCOPUS:34250745199
SN - 0780394992
SN - 0780394984
SN - 9780780394988
T3 - IEEE International Reliability Physics Symposium Proceedings
SP - 633
EP - 634
BT - 2006 IEEE International Reliability Physics Symposium Proceedings, 44th Annual
T2 - 44th Annual IEEE International Reliability Physics Symposium, IRPS 2006
Y2 - 26 March 2006 through 30 March 2006
ER -