Defect detection for short-loop process and SRAM-cell optimization by using Addressable Failure Site Test Structures (AFS-TS)

Kelvin Yih Yuh Doong, Sunnys Hsieh, S. C. Lin, J. R. Wang, Binson Shen, L. J. Hung, Jyh-Chyurn Guo, I. C. Chen, K. L. Young, Charles Ching-Hsiang Hsu

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