TY - JOUR
T1 - Decomposition of trimethyl indium on Si (111)-7 × 7 studied with XPS, UPS and HREELS
AU - Bu, Y.
AU - Chu, Jason C.S.
AU - Lin, Ming-Chang
PY - 1992/1/1
Y1 - 1992/1/1
N2 - The techniques of XPS, UPS and HREELS are utilized to investigate the thermal decomposition of trimethyl indium (TMIn) on Si (111) -7 × 7. At 120 K, TMIn was primarily molecularly adsorbed on the surface. As the sample was annealed at higher temperatures, species such as CH3, CH2, In, C and H, etc., were identified. At temperatures above 950 K, SiC was the only species detected.
AB - The techniques of XPS, UPS and HREELS are utilized to investigate the thermal decomposition of trimethyl indium (TMIn) on Si (111) -7 × 7. At 120 K, TMIn was primarily molecularly adsorbed on the surface. As the sample was annealed at higher temperatures, species such as CH3, CH2, In, C and H, etc., were identified. At temperatures above 950 K, SiC was the only species detected.
UR - http://www.scopus.com/inward/record.url?scp=0026910471&partnerID=8YFLogxK
U2 - 10.1016/0167-577X(92)90158-G
DO - 10.1016/0167-577X(92)90158-G
M3 - Article
AN - SCOPUS:0026910471
SN - 0167-577X
VL - 14
SP - 207
EP - 213
JO - Materials Letters
JF - Materials Letters
IS - 4
ER -