Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2

K. Y. Hsiang; C. Y. Liao; Y. Y. Lin; Z. F. Lou; C. Y. Lin; J. Y. Lee; F. S. Chang; Z. X. Li; H. C. Tseng; C. C. Wang; W. C. Ray; T. H. Hou; T. C. Chen; C. S. Chang; M. H. Lee

doi:10.1109/IRPS48227.2022.9764533

Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂

K. Y. Hsiang, C. Y. Liao, Y. Y. Lin, Z. F. Lou, C. Y. Lin, J. Y. Lee, F. S. Chang, Z. X. Li, H. C. Tseng, C. C. Wang, W. C. Ray, T. H. Hou, T. C. Chen, C. S. Chang, M. H. Lee

電機工程學系

研究成果: Conference contribution › 同行評審

1 引文斯高帕斯（Scopus）

摘要

Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

原文	English
主出版物標題	2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings
發行者	Institute of Electrical and Electronics Engineers Inc.
頁面	P91-P94
ISBN（電子）	9781665479509
DOIs	https://doi.org/10.1109/IRPS48227.2022.9764533
出版狀態	Published - 2022
事件	2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Dallas, United States 持續時間: 27 3月 2022 → 31 3月 2022

出版系列

名字	IEEE International Reliability Physics Symposium Proceedings
卷	2022-March
ISSN（列印）	1541-7026

Conference

Conference	2022 IEEE International Reliability Physics Symposium, IRPS 2022
國家/地區	United States
城市	Dallas
期間	27/03/22 → 31/03/22

存取文件

10.1109/IRPS48227.2022.9764533

其它文件與鏈接

Link to publication in Scopus

引用此

Hsiang, K. Y., Liao, C. Y., Lin, Y. Y., Lou, Z. F., Lin, C. Y., Lee, J. Y., Chang, F. S., Li, Z. X., Tseng, H. C., Wang, C. C., Ray, W. C., Hou, T. H., Chen, T. C., Chang, C. S., & Lee, M. H. (2022). Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. 於 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings (頁 P91-P94). (IEEE International Reliability Physics Symposium Proceedings; 卷 2022-March). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IRPS48227.2022.9764533

Hsiang, K. Y. ; Liao, C. Y. ; Lin, Y. Y. 等. / Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. 頁 P91-P94 (IEEE International Reliability Physics Symposium Proceedings).

@inproceedings{88f9659ba73247ccb212f34952fa0fd3,

title = "Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2",

abstract = "Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.",

keywords = "Antiferroelectric, Endurance, Ferroelectric, HfZrO2",

author = "Hsiang, {K. Y.} and Liao, {C. Y.} and Lin, {Y. Y.} and Lou, {Z. F.} and Lin, {C. Y.} and Lee, {J. Y.} and Chang, {F. S.} and Li, {Z. X.} and Tseng, {H. C.} and Wang, {C. C.} and Ray, {W. C.} and Hou, {T. H.} and Chen, {T. C.} and Chang, {C. S.} and Lee, {M. H.}",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; null ; Conference date: 27-03-2022 Through 31-03-2022",

year = "2022",

doi = "10.1109/IRPS48227.2022.9764533",

language = "English",

series = "IEEE International Reliability Physics Symposium Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "P91--P94",

booktitle = "2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings",

address = "United States",

}

Hsiang, KY, Liao, CY, Lin, YY, Lou, ZF, Lin, CY, Lee, JY, Chang, FS, Li, ZX, Tseng, HC, Wang, CC, Ray, WC, Hou, TH, Chen, TC, Chang, CS & Lee, MH 2022, Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. 於 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings. IEEE International Reliability Physics Symposium Proceedings, 卷 2022-March, Institute of Electrical and Electronics Engineers Inc., 頁 P91-P94, 2022 IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, United States, 27/03/22. https://doi.org/10.1109/IRPS48227.2022.9764533

Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. / Hsiang, K. Y.; Liao, C. Y.; Lin, Y. Y. 等.

2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. p. P91-P94 (IEEE International Reliability Physics Symposium Proceedings; 卷 2022-March).

研究成果: Conference contribution › 同行評審

TY - GEN

T1 - Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2

AU - Hsiang, K. Y.

AU - Liao, C. Y.

AU - Lin, Y. Y.

AU - Lou, Z. F.

AU - Lin, C. Y.

AU - Lee, J. Y.

AU - Chang, F. S.

AU - Li, Z. X.

AU - Tseng, H. C.

AU - Wang, C. C.

AU - Ray, W. C.

AU - Hou, T. H.

AU - Chen, T. C.

AU - Chang, C. S.

AU - Lee, M. H.

PY - 2022

Y1 - 2022

N2 - Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

AB - Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

KW - Antiferroelectric

KW - Endurance

KW - Ferroelectric

KW - HfZrO2

UR - http://www.scopus.com/inward/record.url?scp=85130761538&partnerID=8YFLogxK

U2 - 10.1109/IRPS48227.2022.9764533

DO - 10.1109/IRPS48227.2022.9764533

M3 - Conference contribution

AN - SCOPUS:85130761538

T3 - IEEE International Reliability Physics Symposium Proceedings

SP - P91-P94

BT - 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

Y2 - 27 March 2022 through 31 March 2022

ER -

Hsiang KY, Liao CY, Lin YY, Lou ZF, Lin CY, Lee JY 等. Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. 於 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2022. p. P91-P94. (IEEE International Reliability Physics Symposium Proceedings). doi: 10.1109/IRPS48227.2022.9764533