Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2

K. Y. Hsiang, C. Y. Liao, Y. Y. Lin, Z. F. Lou, C. Y. Lin, J. Y. Lee, F. S. Chang, Z. X. Li, H. C. Tseng, C. C. Wang, W. C. Ray, T. H. Hou, T. C. Chen, C. S. Chang, M. H. Lee

研究成果: Conference contribution同行評審

摘要

Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

原文English
主出版物標題2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
頁面P91-P94
ISBN(電子)9781665479509
DOIs
出版狀態Published - 2022
事件2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Dallas, United States
持續時間: 27 3月 202231 3月 2022

出版系列

名字IEEE International Reliability Physics Symposium Proceedings
2022-March
ISSN(列印)1541-7026

Conference

Conference2022 IEEE International Reliability Physics Symposium, IRPS 2022
國家/地區United States
城市Dallas
期間27/03/2231/03/22

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