Confocal displacement sensor with varifocal lens

Chun Jen Weng, Tzu Hsien Lan, Chi Hung Hwang, Da Ren Liu, Chih Yen Chen, Pi-Ying Cheng, Ken-Yuh Hsu

    研究成果: Conference contribution同行評審

    6 引文 斯高帕斯(Scopus)

    摘要

    A confocal displacement sensor with a varifocal lens and a multi-wavelength rainbow laser was established in this study. The surface curvature of varifocal lens was varied by different current driving so that the focal length can be easily changed. Thus, we can quickly measure the distance between the sensor head and targets by detecting the reflective power according to the principle of confocal laser. This rainbow laser can operate at four different wavelengths. The laser beams with different colors can be used to measure the dispersion of varifocal lens. The range of measuring displacement with 20X objective lens in this displacement sensor is from 4.9mm to 5.9mm. The FWHM resolution of displacement is about 70μm. The step-height aluminate plate was measured by this system and the error of measuring distance is less than 35μm (0.75%).

    原文English
    主出版物標題2015 IEEE International Instrumentation and Measurement Technology Conference - The "Measurable" of Tomorrow
    主出版物子標題Providing a Better Perspective on Complex Systems, I2MTC 2015 - Proceedings
    發行者Institute of Electrical and Electronics Engineers Inc.
    頁面728-733
    頁數6
    ISBN(電子)9781479961139
    DOIs
    出版狀態Published - 6 七月 2015
    事件2015 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2015 - Pisa, Italy
    持續時間: 11 五月 201514 五月 2015

    出版系列

    名字Conference Record - IEEE Instrumentation and Measurement Technology Conference
    2015-July
    ISSN(列印)1091-5281

    Conference

    Conference2015 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2015
    國家/地區Italy
    城市Pisa
    期間11/05/1514/05/15

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